High Purity Gases
High purity gases typically have a purity of greater than 99.9999%. That means these gases have less impurities than typical gases used in industrial applications. TESCOM™ regulators are designed to meet high gas purity needs for Semiconductor, Photovoltaic, Nanotechnology, Flat Panel Display and Pharmaceutical Bioprocess applications. Some advanced features include metal to metal diaphragm seals, surface passivation, internal surface finishes, VCR® or “C” or “W” seal options and FDA compliant designs.
 | TESCOM 12 Series is a miniature ultra high purity IGS/VCR pressure reducing regulator. The 12 Series offers 5 Ra or 10 Ra micro inch finishes, tied diaphragm and internally springless & threadless design. |
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 | TESCOM 15 Series is designed for ultra high flow application of up to 28,300 SLPM. The 15 Series Ultra High Purity, 10 Ra, Bulk Gas Pressure Reducing Regulator. Inlet 300 PSIG, Outlet up to 150 PSIG. Available Electronically controlled option. |
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 | TESCOM 23 Series ultra high purity inline regulator offers 5 Ra & 10 Ra microinch finishes with high flow capabilities to 950 SLPM. |
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 | TESCOM 22-2200 Series high purity BA Grade pressure reducing regulator provides 316 stainless steel construction with 25 Ra surface finish and is electronic grade cleaned. |
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 | TESCOM 22-5300 Series high purity, high flow BA Grade pressure reducing regulator offers a Cv=1.0, 316 stainless steel Electropolished body of 25 Ra. Inlet pressure is 600 PSIG [41.3 bar] with outlet pressures up to 150 PSIG [10.3 bar]. |
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 | TESCOM 449-254 Series high purity, high flow pressure reducing regulators is ideal for high pressure bulk specialty gas delivery systems (BSGS). The 449-254 Series offers a Cv=1.0, surface finish of 10 Ra and is available with Hastelloy® trim. |
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 | TESCOM 64-2600 Series economical ultra high purity pressure reducing regulator provides stainless steel construction with 10 Ra surface finish and is electronic grade cleaned. |
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 | TESCOM 64-2800 Series ultra high purity, tied diaphragm pressure reducing regulator offers stainless steel construction with 10 Ra surface finish and is electronic grade cleaned. |
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 | TESCOM 64-3200 Series ultra high purity, high flow tied diaphragm pressure reducing regulator offers 10 Ra surface finish and is available in Hastelloy® trim. |
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 | TESCOM 64-3400 Series dual-stage, ultra high purity pressure reducing regulator offers a tied diaphragm design and 10 Ra surface finish with available Hastelloy® trim. |
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 | TESCOM 64-3600 Series ultra high purity, highly sensitive pressure reducing regulator offers low droop, tied diaphragm design, 10 Ra surface finish with available Hastelloy® trim. |
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 | TESCOM 64-5000 Series ultra high purity absolute/subatmospheric pressure reducing regulator offers a 10 Ra surface finish. |
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 | TESCOM 64-5400 Series ultra high purity pressure reducing regulator provides 316 stainless steel with Electropolish, 10 Ra surface finish and Hastelloy® diaphragm design. |
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 | TESCOM 74-2400 Series ultra high purity tied diaphragm pressure reducing regulator provides low internal volume and an internally springless & threadless design. The 74-2400 Series offers 5 Ra or 10 Ra surface finishes and 316 stainless steel VAR. |
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 | TESCOM 74-3000 Series ultra high purity pressure reducing regulator offers 5 Ra or 10 Ra surface finishes, high flow Cv= 0.5, and an internally threadless and low internal volume design. |
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 | TESCOM 74-3800 Series ultra high purity tied diaphragm pressure reducing regulator offers high flow and internally threadless and low internal volume design with Cv=0.5. The 74-3800 Series in available with 5 Ra or 10 Ra surface finishes. |
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 | TESCOM PH-1600 Series high purity, high flow single stage regulator offers a compact, USP Class VI and BPE compliant design suitable for biotech and pharm gas flows of 5-200 SCFM [141-5663 SLPM]. |
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 | TESCOM PH-1800 Series high purity, high flow single stage regulator offers a compact, USP Class VI and BPE compliant design suitable for biotech and pharm gas flows of 5-2000 SCFM [141-56633 SLPM]. |
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 | TESCOM PH-2200 Series high purity single stage regulator offers a compact, USP Class VI and BPE compliant design suitable for specialty, corrosive, and pyrophoric gases of less than 5 SCFM [141 SLPM]. |
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 | TESCOM PH-2600 Series high purity single stage regulator offers a compact, USP Class VI and BPE compliant design suitable for specialty, corrosive, and pyrophoric gases flows of less than 10 SCFM [283 SLPM]. |
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 | TESCOM PH-3200 Series high purity high flow single stage regulator offers a compact, USP Class VI and BPE compliant design suitable for biotech and pharm gas flows of 5-50 SCFM [141-1415 SLPM]. |
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